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Titanium Sputtering Target (Ti)

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The S4R Titanium Sputtering Target is manufactured from high-purity titanium metal for physical vapor deposition and magnetron sputtering applications.

Titanium is a lightweight, corrosion-resistant metal with good mechanical strength and a strong affinity for reactive gases. It is widely used for the deposition of metallic, adhesion-promoting, protective and functional thin films in research, electronics, optics, energy and materials science.

The target is available in two standard laboratory formats with a nominal purity of 99.99% (4N):

  • Ø50.8 × 3 mm
  • Ø76.2 × 3 mm

Other dimensions, thicknesses, purity grades and backing-plate configurations may be available upon request.

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Specification
Product Name Titanium Sputtering Target
Material Titanium
Chemical Symbol Ti
CAS Number 7440-32-6
Purity 99.99% (4N)
Shape Circular Disc
Standard Size 1 Ø50.8 × 3 mm
Standard Size 2 Ø76.2 × 3 mm
Imperial Equivalents 2 in. or 3 in. diameter
Quantity 1 Target
Appearance Metallic, Silvery-Grey
Odor Odorless
Atomic Number 22
Atomic Weight 47.867 g/mol
Theoretical Density Approximately 4.51 g/cm³
Melting Point Approximately 1,668 °C
Thermal Conductivity Approximately 22 W·m⁻¹·K⁻¹
Coefficient of Thermal Expansion Approximately 8.6 × 10⁻⁶ K⁻¹
Magnetic Behavior Non-Ferromagnetic
Recommended Sputtering Mode DC Magnetron Sputtering
Reactive Sputtering Compatibility Suitable for TiN, TiO₂ and Related Thin Films
Standard Configuration Unbonded Solid Target
Bonding Options Available Upon Request

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