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Molybdenum Sputtering Target (Mo)

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The S4R Molybdenum Sputtering Target is manufactured from high-purity molybdenum metal for physical vapor deposition and magnetron sputtering applications.

Molybdenum is a refractory metal characterized by a very high melting point, good thermal stability, low thermal expansion and good electrical conductivity. It is widely used for the deposition of conductive, diffusion-barrier, electrode and functional thin films in semiconductor, display, photovoltaic, electronic and materials-science research.

The target is available in two standard laboratory formats with a nominal purity of 99.95% (3N5):

  • Ø50.8 × 3 mm
  • Ø76.2 × 3 mm

Other dimensions, thicknesses, purity grades and backing-plate configurations may be available upon request.

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Specification
Product Name Molybdenum Sputtering Target
Material Molybdenum
Chemical Symbol Mo
CAS Number 7439-98-7
Purity 99.95% (3N5)
Shape Circular Disc
Standard Size 1 Ø50.8 × 3 mm
Standard Size 2 Ø76.2 × 3 mm
Imperial Equivalents 2 in. or 3 in. diameter
Quantity 1 Target
Appearance Metallic, Silvery-Grey
Odor Odorless
Atomic Number 42
Atomic Weight 95.95 g/mol
Theoretical Density Approximately 10.28 g/cm³
Melting Point Approximately 2,623 °C
Thermal Conductivity Approximately 138 W·m⁻¹·K⁻¹
Coefficient of Thermal Expansion Approximately 4.8 × 10⁻⁶ K⁻¹
Magnetic Behavior Non-Ferromagnetic
Recommended Sputtering Mode DC Magnetron Sputtering
Standard Configuration Unbonded Solid Target
Bonding Options Available Upon Request

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