Lithium Cobalt Oxide Sputtering Target (LiCoO₂, LCO)
The S4R Lithium Cobalt Oxide Sputtering Target is manufactured from high-purity LiCoO₂ ceramic for physical vapor deposition and magnetron sputtering applications.
Lithium cobalt oxide is a layered lithium transition-metal oxide widely used as a cathode material in lithium-ion battery research. In thin-film form, it is particularly suitable for microbattery, solid-state battery, cathode–electrolyte interface and electrochemical coating studies.
The standard S4R configuration is supplied in a 2-inch laboratory format with a nominal purity of 99.9% (3N):
- Target diameter: Ø50.8 mm (2 in.)
- Target material thickness: 3.18 mm (0.125 in.)
- Configuration: ceramic target bonded to a metallic backing plate
The backing-plate material, thickness, bonding method and total assembly dimensions must be selected or confirmed according to the customer’s sputtering cathode. Custom dimensions and unbonded configurations may be available upon request.
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Sputtering and Compatibility
LiCoO₂ is a ceramic material and is generally more suitable for RF magnetron sputtering than conventional DC sputtering.
The copper backing plate provides mechanical support and improves heat transfer between the ceramic target and the cooled sputtering cathode. The indium bonding layer provides thermal contact while accommodating part of the thermal-expansion difference between the ceramic target and the metallic backing plate.
Actual process parameters depend on:
- sputtering-source design;
- RF generator and matching network;
- target density and microstructure;
- target-to-backing-plate thermal contact;
- cathode cooling;
- argon and oxygen partial pressure;
- target-to-substrate distance;
- substrate temperature;
- required film composition and crystallinity.
S4R does not specify a universal maximum RF power. Users should follow the sputtering-source manufacturer’s instructions and begin with conservative power settings during target conditioning.
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